王增林,男,1964年9月出生,2000年畢業(yè)于九州工業(yè)大學(xué),獲工學(xué)博士,現(xiàn)受聘于陜西師范大學(xué)。

個(gè)人資料

1988年至1996年在中科院長春應(yīng)用化學(xué)研究所從事稀土配位化學(xué)研究,1994年晉升為副研究員。1996年赴日本留學(xué),2000年獲九州工業(yè)大學(xué)工學(xué)博士。2000年5月至2004年8月在日本熊本縣縣立產(chǎn)業(yè)財(cái)團(tuán)和廣島大學(xué)從事化學(xué)鍍銅的基礎(chǔ)研究以及在半導(dǎo)體、印刷電路板中的應(yīng)用博士后研究。2004年9月受聘于陜西師范大學(xué)。

先后主持國家自然科學(xué)基金2項(xiàng)、教育部留學(xué)回國人員科研啟動(dòng)基金1項(xiàng)、陜西省自然科學(xué)基金1項(xiàng)、西安應(yīng)用材料創(chuàng)新基金1項(xiàng)、企業(yè)合作項(xiàng)目2項(xiàng)。在國內(nèi)外重要刊物及學(xué)術(shù)會(huì)議發(fā)表論文50余篇,其中SCI收錄的國際期刊30余篇;申請中國發(fā)明專利1項(xiàng),獲得日本發(fā)明專利7項(xiàng),其中3項(xiàng)同時(shí)獲美國專利。

研究方向

(1)無甲醛化學(xué)鍍銅溶液的研究;

(2) 超級化學(xué)鍍銅體系和超級電鍍銅體系的基礎(chǔ)研究及應(yīng)用;

(3) 環(huán)境友好的表面微蝕技術(shù)研究。

科研成果
Zhifeng Yang, Na Li, Xu Wang, Zhixiang Wang, and Zenglin Wang, Bottom-Up Filling in Electroless Plating with an Addition of PEG–PPG Triblock Copolymers, Electrochem. Solid-State Lett., 2010, 13(7), D947-49Zhixin Li, Na Li, Lie Yin, Yue He, and Zenglin Wang, An environment-friendly surface pretreatment of ABS resin prior to electroless plating, Electrochem. Solid-State Lett., 2009, 12(12), D92-95 Zenglin Wang, Zonghuai Liu, Zupei Yang, Shoso Shingubara. Characterization of sputtered tungsten nitride film and its application to Cu electroless plating. Microelectron. Eng. 2008, 85, 395-400 Zenglin Wang, Zhijuan Liu, Hongyan Jiang, Xiu Wei Wang. Bottom-up fill mechanisms of electroless copper plating with addition of mercapto alkyl carboxylic acid. J. Vac. Sci. Technol. B, 2006, 24(2), 803-806 Zenglin Wang, Shoso Shingubara, Hiroyuki Sakaue, Takayuki Takahagi. Bottom-up copper fill with addition of mercapto alkyl carboxylic acid in electroless plating. Electrochimi. Acta. 2006, 51, 2442-2446 Zenglin Wang, Shoso Shingubara, Hiroyuki Sakaue, Takayuki Takahagi. Characterization of electroless-plated Cu film over Pd catalytic layer formed by an ionized cluster beam. J. Electrochem. Soc. 2005,152 (10), C682-C687 Zenglin Wang, Osamu Yaegashi, Hiroyuki Sakaue, Takayuki Takahagi and Shoso Shingubara. Bottom-up fill for submicrometer copper via holes of ULSIs by electroless plating. J. Electrochem. Soc. 2004, 151(12), C781-C785 Zenglin Wang, Osamu Yaegashi, Hiroyuki Sakaue, Takayuki Takahagi and Shoso Shingubara. Effect of additives on hole fill property in electroless copper plating. Jpn. J. Appl. Phys. 2004, 43(10), 7000-7001 Zenglin Wang, Osamu Yaegashi, Hiroyuki Sakaue, Shoso Shingubara and Takayuki Takahagi. Suppression of native oxide growth in sputtered TaN films and its application for Cu electroless plating. J. Appl. Phys. 2003, 97(7), 4697-4701 Zenglin Wang, Osamu Yaegashi, Hiroyuki Sakaue, Takayuki Takahagi and Shoso Shingubara. Highly adhesive electroless Cu layer formation by ultra thin ICB-Pd catalytic layer for sub 100 nm Cu interconnections. Jpn. J. Appl. Phys. Express Lett. 2003, 42(10B), L1223-L1225 Zenglin. Wang, T. Ida, H. Sawa, H. Sakaue, S. Shingubara and T. Takahagi. Electroless plating of copper on metal-nitride diffusion barriers initiated by displacement plating. Electrochem. Solid-State Lett. 2003, 6(3), C38-C41